Products and Capabilities

Products and Capabilities
Patterned Thin Films
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Metrology and Reliability
•Cary 500 Spectrophotometer, 175 – 3300nm, -77K to 350K •Perkin Elmer 983 Spectrophotometer, 2 – 55μm
•Woollam Variable Angle Spectroscopic Ellipsometer, 250-1700nm, 2 – 33µm
•Nikon HighResolution Microscope, ± 0.29 µm resolution
•Auto Collimator
•Zygo Interferometer, λ /20 @ 633nm
•Zygo Interferometer, λ / 100 @ 1550nm
•Dektak Profilometer, 1µm to 1mm thick, 4" lateral profile
•Humidity Chamber, 5-95% RH
•Thermal Cycling Oven, 10-200C













